Oxygen (dissolved)

Advanced microelectronics manufacturing processes require low single digit to 10 ppb dissolved oxygen (DO) concentrations in the ultrapure rinse water to prevent oxidation of wafer films and layers. DO in power plant water and steam must be controlled to ppb levels to minimize corrosion.

Impurities in the rinse water such as high dissolved oxygen content, organic contaminants and gas bubbles can cause defects. Controlling oxide formation on the wafer surface is one of the reasons for reducing residual dissolved oxygen levels. As chip line widths continue to decrease, the quality of the water and the dissolved oxygen content becomes more critical.

Monitor AMI Oxytrace

High precision monitor with three electrode Oxytrace G sensor for the continuous measurement of trace levels of dissolved oxygen in high purity water.

Range: 0-20 ppm or 0-200 % saturation (at 25°C).

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Monitor AMI Oxytrace QED

High precision monitor with three electrode Oxytrace G sensor for the continuous measurement of trace levels of dissolved oxygen in high purity water.

Integrated auto verification with faraday electrode setup.

Range: 0-20 ppm or 0-200 % saturation (at 25°C).

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Monitor AMI Oxytrace QED; compact version

High precision monitor with three electrode Oxytrace G sensor for the continuous measurement of trace levels of dissolved oxygen in high purity water.

Integrated auto verification with faraday electrode setup.

Mounted on a small panel (width: 400mm, height 420 mm).

Range: 0-20 ppm or 0-200 % saturation (at 25°C).

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QA-Monitor AMI INSPECTOR Oxygen

Portable inspection equipment for quality assurance of trace oxygen monitors.

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Monitor AMI Oxytrace; compact version

High precision monitor with three electrode Oxytrace G sensor for the continuous measurement of trace levels of dissolved oxygen in high purity water.
Mounted on a small panel (width: 280 mm, height: 180 mm)

Range: 0-20 ppm or 0-200 % saturation (at 25°C).

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Single Components Oxytrace

Transmitters, sensors and flow cells are separately available for system integration.

  • Transmitters
    Electronic transmitters/controllers for wall mounting and inserting into panels. Several output options including certified PROFIBUS DP interface.
  • Sensors
    Trace oxygen sensor with integrated temperature probe and pre-mounted membranes.
  • Flow Cells
    Flow cells made of stainless steel or perspex.
  • Spares Parts
    Spare parts for OXYTRACE sensors.

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